Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11987740 | Silicon nitride film etching composition and etching method using the same | Dong Hyun Kim, Hyeon Woo PARK, Sung Jun Hong, Myung Ho Lee, Myung Geun Song +3 more | 2024-05-21 |
| 11939505 | Silicon nitride film etching composition and etching method using the same | Dong Hyun Kim, Hyeon Woo PARK, Sung Jun Hong, Myung Ho Lee, Myung Geun Song +3 more | 2024-03-26 |