Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911806 | Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium | Kunimasa Matsushita, Hiroshi Ishikawa | 2024-02-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911806 | Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium | Kunimasa Matsushita, Hiroshi Ishikawa | 2024-02-27 |