Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12002704 | Substrate holding apparatus, substrate processing apparatus having substrate holding apparatus, and substrate processing method | Makoto Kashiwagi | 2024-06-04 |
| 11865665 | Polishing apparatus | Kenichi Kobayashi, Masayuki Nakanishi, Makoto Kashiwagi | 2024-01-09 |