Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11911868 | Substrate processing apparatus, substrate processing method, and storage medium that stores program to cause computer in substrate processing apparatus to execute substrate processing method | Takashi Mitsuya, Ayumu Saito | 2024-02-27 |
| 11890716 | Polishing unit, substrate processing apparatus, and polishing method | Akihiro Yazawa, Kenichi Kobayashi | 2024-02-06 |