Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11946470 | Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method | Tetsuro Sugiura, Katsuaki Usui, Masahiro Hatakeyama, Chikako Honma, Toru Osuga +2 more | 2024-04-02 |