Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901191 | Atomic layer etching method and semiconductor device manufacturing method using the same | Eun Hyea KO, Hee Yeon Jeong, Jun-Hee Cho, Gyu-hee Park, Byeong-il YANG +2 more | 2024-02-13 |