Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11935778 | Holding mechanism including Bernoulli pad | Yoshinori KAKINUMA, Yoshikuni MIGIYAMA, Yoshinobu Saito | 2024-03-19 |
| 11923223 | Apparatus and method for detecting a wafer in a cassette | Yoshinobu Saito | 2024-03-05 |