Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12170222 | Substrate support assembly for substrate treatment apparatus | — | 2024-12-17 |
| 12146216 | Substrate treatment apparatus having exhaust structure | Jun Hwan Lee, Man Je Bang | 2024-11-19 |
| 12148634 | Device for etching the periphery edge of a substrate comprising substrate sensing unit | — | 2024-11-19 |
| 12115562 | Substrate treatment apparatus having back nozzle assembly | — | 2024-10-15 |
| 12059713 | Substrate treating apparatus comprising ultrasonic wave cleaning unit | — | 2024-08-13 |