Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12171053 | System for monitoring a plasma | Michael A. Purvis, Klaus Hummler, Chengyuan Ding, Robert Jay Rafac | 2024-12-17 |
| 12078934 | Laser system for target metrology and alteration in an EUV light source | Robert Jay Rafac | 2024-09-03 |