Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984321 | Method for etching deep, high-aspect ratio features into silicon carbide and gallium nitride | Michael Syskind PEDERSEN, Michael A. Huff | 2024-05-14 |
| 11927281 | Piezoelectrically-actuated microvalve device and method of fabrication | Michael A. Huff | 2024-03-12 |