Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128452 | Multifunctional single wafer soaking-spinning-cleaning device and wafer processing method | Li-tso HUANG, Hsiu-kai CHANG, Chin-yuan WU | 2024-10-29 |
| 12048978 | Robotic tool changer system and method for performing tool change with robotic tool changer system | SYUAN-JYUN WU | 2024-07-30 |
| 12048999 | Method for performing tool change with robot arm | SYUAN-JYUN WU | 2024-07-30 |