Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12139642 | CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same | Eui Rang LEE, Yoon Young KOO, Won Jung Kim, Hyeong Mook KIM, Tae Won Park +1 more | 2024-11-12 |