Issued Patents 2024
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183776 | Method for forming capacitor via | Chunyang Wang, Zhenxing Li, Bo Shao | 2024-12-31 |
| 12176252 | Method and device for predicting inclination angle, and method and device for monitoring etching device | Bo Shao, Chunyang Wang | 2024-12-24 |
| 12107021 | Process monitoring method and process monitoring system | Chunyang Wang, Changli Zhu | 2024-10-01 |