Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094692 | Focus ring and apparatus for processing a substrate including a focus ring | Jinhyeok KIM, Yeonghun Wi, Yonghyun HAM, Yeonggyo Jeong | 2024-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094692 | Focus ring and apparatus for processing a substrate including a focus ring | Jinhyeok KIM, Yeonghun Wi, Yonghyun HAM, Yeonggyo Jeong | 2024-09-17 |