Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130557 | Optical system and lithography apparatus | Markus Raab | 2024-10-29 |
| 11920977 | Metrology system and method for measuring an excitation laser beam in an EUV plasma source | Florian Baumer | 2024-03-05 |