Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12153353 | Drive device, optical system and lithography apparatus | Oliver Herbst | 2024-11-26 |
| 11901948 | Modulation device, control device, optical system, lithography system and method | Mohammad Awad | 2024-02-13 |