Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164234 | Actuator device and method for aligning an optical element, optical assembly and projection exposure apparatus | — | 2024-12-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12164234 | Actuator device and method for aligning an optical element, optical assembly and projection exposure apparatus | — | 2024-12-10 |