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Petra Spies

CG Carl Zeiss Smt Gmbh: 1 patents #33 of 148Top 25%
Overall (2024): #312,502 of 561,600Top 60%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11961705 Method and apparatus for examining a beam of charged particles Daniel Rhinow, Markus Bauer, Rainer Fettig, David Lämmle, Marion Batz +3 more 2024-04-16