Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098913 | Detector that detects relative positions of marks while blocking non-interference light | Yasuyuki Unno, Tooru Kawashima | 2024-09-24 |
| 11880132 | Imprint apparatus and method of manufacturing article | Tadao Nakamura, Kiyohito Yamamoto | 2024-01-23 |