Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988956 | Measurement method, imprint apparatus, and article manufacturing method | Masataka Yasukawa | 2024-05-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11988956 | Measurement method, imprint apparatus, and article manufacturing method | Masataka Yasukawa | 2024-05-21 |