Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12140878 | Processing system, processing method, measurement apparatus, substrate processing apparatus and article manufacturing method | — | 2024-11-12 |
| 12025924 | Method of determining set of sample shot regions, method of obtaining measurement value, information processing apparatus, lithography apparatus, storage medium, and article manufacturing method | — | 2024-07-02 |