Issued Patents 2024
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176219 | Semiconductor device forming method and substrate processing apparatus | Eiji UMEDA | 2024-12-24 |
| 12106982 | Substrate processing device | — | 2024-10-01 |
| 12065746 | Substrate processing method and substrate processing apparatus | Akihisa IWASAKI, Yasutoshi Okuno | 2024-08-20 |
| 11958087 | Substrate processing method and substrate processing apparatus | Kei Suzuki | 2024-04-16 |
| 11919049 | Substrate processing method and substrate processing apparatus | Linh Da HO, Kei Suzuki | 2024-03-05 |
| 11915930 | Substrate processing method and substrate processing apparatus | Naoko ARIMA | 2024-02-27 |