Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12130562 | Method of obtaining array of plurality of regions on substrate, exposure apparatus, method of manufacturing article, non-transitory storage medium, and information processing apparatus | — | 2024-10-29 |
| 11947267 | Method of obtaining array of plurality of shot regions on substrate, exposure method, exposure apparatus, method of manufacturing article, non-transitory computer-readable storage medium, and information processing apparatus | Fuma Kizu | 2024-04-02 |