Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183599 | Substrate treatment device and substrate treatment method | Eiji Fukatsu | 2024-12-31 |
| 11961744 | Substrate processing apparatus and substrate processing method | Eiji Fukatsu, Koji Hashimoto, Hiroyuki Fujiki | 2024-04-16 |