Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12148642 | Humidity control in semiconductor systems | — | 2024-11-19 |
| 12087603 | Inspection system | — | 2024-09-10 |
| 11978652 | Automatic handling buffer for bare stocker | — | 2024-05-07 |
| 11872603 | Method for cleaning a synthetic surface | Matthias Fryda, Thorsten Matthee | 2024-01-16 |