Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12027427 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Michael vanAbbema | 2024-07-02 |
| 12014920 | Apparatus for hydrogen assisted atmospheric radical oxidation | Michael X. Yang, Christian Pfahler | 2024-06-18 |