Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12146125 | Use of compositions comprising a solvent mixture for avoiding pattern collapse when treating patterned materials with line-space dimensions of 50 nm or below | Marcel Brill, Daniel LOEFFLER, Yeni Burk, Frank Oliver Heinrich Pirrung, Lothar Alexander Engelbrecht +3 more | 2024-11-19 |