Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11866554 | Polycarbosilazane, and composition comprising the same, and method for producing silicon-containing film using the same | Toshiya OKAMURA, Tetsuo Okayasu, Thorsten Vom Stein | 2024-01-09 |