SS

Shu Satoh

AT Axcelis Technologies: 1 patents #3 of 17Top 20%
📍 Byfield, MA: #1 of 2 inventorsTop 50%
🗺 Massachusetts: #5,064 of 14,432 inventorsTop 40%
Overall (2024): #269,289 of 561,600Top 50%
1
Patents 2024

Issued Patents 2024

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11923169 Apparatus and method for metal contamination control in an ion implantation system using charge stripping mechanism Causon Ko-Chuan Jen, Genise Bonacorsi, William Bintz 2024-03-05