Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887808 | Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity | Atul Gupta | 2024-01-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11887808 | Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity | Atul Gupta | 2024-01-30 |