Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12010425 | Overlay measurement device and method for controlling focus movement and program storage medium therefor | Seong-Yun Choi | 2024-06-11 |
| 12002249 | Deep learning-based overlay key centering system and method thereof | Soo-Yeon Mo, Ga-Min Kim | 2024-06-04 |