Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174550 | Calibration system for an extreme ultraviolet light source | Daniel Jason Riggs, Liane Manuela Matthes, Martinus Hendrikus Antonius Leenders | 2024-12-24 |
| 11984236 | Radiation system | Han-Kwang Nienhuys, Gosse Charles De Vries | 2024-05-14 |