Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11947271 | Lithographic systems and methods of operating the same | Mikhail Yurievich Loktev | 2024-04-02 |
| 11921435 | Lithographic systems and methods of operating the same | Mikhail Yurievich Loktev | 2024-03-05 |