Issued Patents 2024
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12117726 | Pellicle and pellicle assembly | Chaitanya Krishna ANDE, Antonius Franciscus Johannes De Groot, Adrianus Johannes Maria Giesbers, Johannes Joseph Janssen, Paul Janssen +18 more | 2024-10-15 |
| 12066758 | Pellicle and pellicle assembly | Erik Achilles Abegg, Aage Bendiksen, Derk Servatius Gertruda Brouns, Pradeep K. Govil, Paul Janssen +9 more | 2024-08-20 |
| 12032301 | Substrate support, lithographic apparatus and loading method | Johannes Onvlee, Antonius Franciscus Johannes De Groot, Wim Symens | 2024-07-09 |
| 11971654 | Metal-silicide-nitridation for stress reduction | Pieter-Jan Van Zwol, Adrianus Johannes Maria Giesbers, Johan Hendrik Klootwijk, Evgenia KURGANOVA, Maxim Aleksandrovich Nasalevich +4 more | 2024-04-30 |
| 11947256 | Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing | Evgenia KURGANOVA, Adrianus Johannes Maria Giesbers, Maxim Aleksandrovich Nasalevich, Arnoud Willem Notenboom, Mária Péter +2 more | 2024-04-02 |