Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077857 | Temperature control assembly for substrate processing apparatus and method of using same | SungHoon Jun, Heechul Jung | 2024-09-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12077857 | Temperature control assembly for substrate processing apparatus and method of using same | SungHoon Jun, Heechul Jung | 2024-09-03 |