Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11965262 | Substrate supporting plate, thin film deposition apparatus including the same, and thin film deposition method | Jong Won Shon, Seung Woo Choi, Dong Seok Kang | 2024-04-23 |