Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923181 | Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing | WonKi Jeong | 2024-03-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11923181 | Substrate processing apparatus for minimizing the effect of a filling gas during substrate processing | WonKi Jeong | 2024-03-05 |