Issued Patents 2024
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12098460 | Systems and methods for stabilizing reaction chamber pressure | — | 2024-09-24 |
| 12100597 | Method and system for forming patterned structures including silicon nitride | — | 2024-09-24 |
| 11961741 | Method for fabricating layer structure having target topological profile | Yoshinori Ota, René Henricus Jozef Vervuurt, Nobuyoshi Kobayashi, Akiko Kobayashi | 2024-04-16 |