Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11862520 | Systems and methods for predicting film thickness of individual layers using virtual metrology | Bharath Ram Sundar, Raman K. Nurani, Ramakrishnan Hariharan, Suresh Bharatharajan Kudallur, Vishwath Ram Amarnath | 2024-01-02 |