Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948061 | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools | Heng HAO, Shreekant Gayaka | 2024-04-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948061 | Deep auto-encoder for equipment health monitoring and fault detection in semiconductor and display process equipment tools | Heng HAO, Shreekant Gayaka | 2024-04-02 |