Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12162796 | Substrate processing system for processing of a plurality of substrates and method of processing a substrate in an in-line substrate processing system | Jurgen Henrich | 2024-12-10 |
| 11972964 | System and method to evaporate an OLED layer stack in a vertical orientation | Jurgen Henrich | 2024-04-30 |