Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12138741 | Polishing fluid collection apparatus and methods related thereto | Peng Liu, Jianjun Hu | 2024-11-12 |
| 12029129 | Method and apparatus for tuning film properties during thin film deposition | Xiao-Dong Yang | 2024-07-02 |