Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12159782 | Ultraviolet and ozone clean system | Banqiu Wu, Hiroki Ogawa, Eliyahu Shlomo DAGAN | 2024-12-03 |
| 12128456 | Megasonic clean with cavity property monitoring | Banqiu Wu, Eliyahu Shlomo DAGAN | 2024-10-29 |
| 12085849 | Baking chamber with shroud for mask clean | Banqiu Wu, Eliyahu Shlomo DAGAN | 2024-09-10 |
| 11921422 | Single-volume baking chamber for mask clean | Banqiu Wu, Eliyahu Shlomo DAGAN | 2024-03-05 |