Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984318 | Directional modification of patterning structure to enhance pattern elongation process margin | Shurong Liang, Alexander C. Kontos | 2024-05-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11984318 | Directional modification of patterning structure to enhance pattern elongation process margin | Shurong Liang, Alexander C. Kontos | 2024-05-14 |