Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11978647 | Method and apparatus for measuring erosion and calibrating position for a moving process kit | Eli Mor, Sergio Lopez Carbajal | 2024-05-07 |
| 11908724 | Method and apparatus for measuring placement of a substrate on a heater pedestal | Anthony D. Vaughan | 2024-02-20 |