Issued Patents 2024
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12072689 | Model-based scheduling for substrate processing systems | Chung-Ho Huang, Henry T. Chan, Vincent Wong, Yu Ding, Ngoc-Diep Nguyen +1 more | 2024-08-27 |
| 12073224 | Autoconfiguration of hardware components of various modules of a substrate processing tool | Bridget Hill, Scott Baldwin, Thomas A. Stubblebine, Rainer Unterguggenberger | 2024-08-27 |