Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094693 | Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring | Jiangtao Pei, Zengdi Lian, Dee H. Wu | 2024-09-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12094693 | Bottom electrode assembly, plasma processing apparatus, and method of replacing focus ring | Jiangtao Pei, Zengdi Lian, Dee H. Wu | 2024-09-17 |