Issued Patents 2024
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12176184 | Synchronization of bias supplies | Gideon Van Zyl, Kevin Fairbairn | 2024-12-24 |
| 12159767 | Spatial control of plasma processing environments | Daniel Carter, Kevin Fairbairn, Victor Brouk | 2024-12-03 |
| 12142460 | Control of plasma sheath with bias supplies | Kevin Fairbairn, Daniel Carter | 2024-11-12 |
| 12009181 | Match efficiency-variation compensation | Holger Philipp Kley, Suryan Emani | 2024-06-11 |