Issued Patents 2024
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875970 | Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus | Longbao Chen, Jie Liang, Leyi Tu | 2024-01-16 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11875970 | Radio frequency electrode assembly for plasma processing apparatus, and plasma processing apparatus | Longbao Chen, Jie Liang, Leyi Tu | 2024-01-16 |