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Filtering device, purification device, and method for manufacturing chemical liquid |
Satomi Takahashi, Tadashi Omatsu, Tetsuya Shimizu |
2023-12-05 |
| 11759749 |
Filtering device, purification device, and method for manufacturing chemical liquid |
Tadashi Omatsu, Tetsuya Shimizu, Satomi Takahashi |
2023-09-19 |
| 11747727 |
Chemical liquid, chemical liquid storage body, pattern forming method, and kit |
Satomi Takahashi |
2023-09-05 |
| 11745142 |
Filter device, purification device, chemical solution production method |
Tadashi Omatsu, Tetsuya Shimizu, Satomi Takahashi |
2023-09-05 |
| 11740557 |
Chemical liquid, chemical liquid storage body, chemical liquid filling method, and chemical liquid storage method |
Satomi Takahashi |
2023-08-29 |
| 11733611 |
Pattern forming method, method for producing electronic device, and kit |
— |
2023-08-22 |
| 11693321 |
Treatment liquid for manufacturing semiconductor, storage container storing treatment liquid for manufacturing semiconductor, pattern forming method, and method of manufacturing electronic device |
Tetsuya Shimizu |
2023-07-04 |
| 11666864 |
Filtering device, purification device, and method for manufacturing chemical liquid |
Tetsuya Shimizu, Tadashi Omatsu, Satomi Takahashi |
2023-06-06 |
| 11573489 |
Solution, solution storage body, actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method, and manufacturing method of semiconductor device |
— |
2023-02-07 |
| 11559758 |
Filtering device, purification device, chemical liquid manufacturing device, filtered substance to be purified, chemical liquid, and actinic ray-sensitive or radiation-sensitive resin composition |
Tetsuya Shimizu |
2023-01-24 |
| 11541354 |
Filtration device, refining device, and production method for liquid medicine |
Tadashi Omatsu, Tetsuya Shimizu, Satomi Takahashi |
2023-01-03 |